Ownership Submission
FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
DAUWALTER JAMES E
   2. Issuer Name and Ticker or Trading Symbol
ENTEGRIS INC [ENTG] 		5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
__X__ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
CEO, President
(Last)
(First)
(Middle)
3500 LYMAN BOULEVARD		 3. Date of Earliest Transaction (Month/Day/Year)
11/19/2004
(Street)

CHASKA, MN 55318		 4. If Amendment, Date Original Filed(Month/Day/Year)
 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)		 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)		 4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)		 5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)		 6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)		 7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price
Common Stock 11/19/2004 11/19/2004 G V 260,000 D $ 0 374,244 I by Carville Company, LP
Common Stock 11/19/2004 11/19/2004 G V 260,000 A $ 0 260,000 I by GRAT
Common Stock 11/19/2004 11/19/2004 G V 260,000 D $ 0 0 I by GRAT
Common Stock 11/19/2004 11/19/2004 G V 260,000 A $ 0 684,065 (1) (2) D  
Common Stock 12/06/2004 12/06/2004 G V 12,000 D $ 0 21,993 I by JJD Industries, LLC
Common Stock 12/06/2004 12/06/2004 G V 12,000 A $ 0 12,000 I by Carville III, LP (3)
Common Stock 12/06/2004 12/06/2004 G V 260,996 D $ 0 0 I by family members
Common Stock 12/06/2004 12/06/2004 G V 260,996 A $ 0 272,996 I by Carville III, LP
Common Stock 12/08/2004 12/08/2004 G V 327,004 D $ 0 357,061 (1) (2) D  
Common Stock 12/08/2004 12/08/2004 G V 327,004 A $ 0 600,000 I by Carville III, LP
Common Stock 02/25/2005 02/25/2005 G V 104,780 D $ 0 186,393 I by Carville Company II, LP
Common Stock 02/25/2005 02/25/2005 G V 104,780 A $ 0 104,780 I by Judith Dauwalter GRAT II
Common Stock 02/25/2005 02/25/2005 G V 104,780 D $ 0 0 I by Judith Dauwalter GRAT II
Common Stock 02/25/2005 02/25/2005 G V 104,780 A $ 0 104,780 I by family members
Common Stock 02/25/2005 02/25/2005 G V 104,780 D $ 0 81,613 I by Carville Company II, LP
Common Stock 02/25/2005 02/25/2005 G V 104,780 A $ 0 104,780 I by GRAT II
Common Stock 02/25/2005 02/25/2005 G V 104,780 D $ 0 0 I by GRAT II
Common Stock 02/25/2005 02/25/2005 G V 104,780 A $ 0 461,841 (1) (2) D  
Common Stock 02/25/2005 02/25/2005 G V 4,277 D $ 0 77,336 I by Carville Company II, LP
Common Stock 02/25/2005 02/25/2005 G V 4,277 A $ 0 26,270 I by JJD Industries, LLC
Common Stock 03/09/2005 03/09/2005 G V 104,780 D $ 0 0 I by family members
Common Stock 03/09/2005 03/09/2005 G V 104,780 A $ 0 566,621 (1) (2) D  
Common Stock 03/09/2005 03/09/2005 G V 260,000 D $ 0 306,621 (1) (2) D  
Common Stock 03/09/2005 03/09/2005 G V 260,000 A $ 0 634,244 I by Carville Company, LP
Common Stock               251,861 (4) I by ESOP

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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)		 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)		 5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)		 6. Date Exercisable and Expiration Date
(Month/Day/Year)		 7. Title and Amount of Underlying Securities
(Instr. 3 and 4)		 8. Price of Derivative Security
(Instr. 5)		 9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)		 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)		 11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares

Reporting Owners

Reporting Owner Name / Address Relationships
 Director  10% Owner  Officer  Other
DAUWALTER JAMES E
3500 LYMAN BOULEVARD
CHASKA, MN 55318		   X     CEO, President  

Signatures

 By: /s/ Lori Cameron, Attorney-in-Fact for James E. Dauwalter   07/14/2005
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Reporting Person received a restricted stock grant of 16,250 shares on October 15, 2003. Reporting Person will be entitled to recieved 25% of such shares on each of October 14, 2004, 2005, 2006, and 2007 provided Reporting Person has complied with certain restrictions such as continued employment.
(2) Reporting Person received a restricted stock grant of 21,667 shares on October 15, 2004. Reporting Person will be entitled to receive 25% of such shares on each of October 15, 2005, 2006, 2007, and 2008 provided Reporting Person has complied with certain restrictions such as continued employment.
(3) This entity was formed as part of a series of transactions for estate planning purposes.
(4) Since the reporting person's last report, 170 shares previously held through the ESOP have been sold to cover administrative expenses.

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