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                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549


                                    FORM 8-K

                                 CURRENT REPORT
                       Pursuant to Section 13 or 15(d) of
                       the Securities Exchange Act of 1934


                                  June 18, 2004
         --------------------------------------------------------------
                Date of Report (date of earliest event reported)


                            NANOMETRICS INCORPORATED
             (Exact name of Registrant as specified in its charter)



          California                  0-13470                    94-2276314
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(State or other jurisdiction of  (Commission File Number)    (I.R.S. Employer
incorporation or organization)                            Identification Number)

                               1550 Buckeye Drive
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                           Milpitas, California 95035
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                    (Address of principal executive offices)


                                 (408) 435-9600
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              (Registrant's telephone number, including area code)



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ITEM 4. Changes in Registrant's Certifying Accountant

         On  June  18,  2004,  Deloitte  &  Touche  LLP  ("Deloitte")   notified
Nanometrics  Incorporated  (the  "Company")  of  its  intent  to  resign  as the
Company's  independent  registered public accounting firm effective  immediately
upon  completion  of  Deloitte's  review of the  Company's  unaudited  condensed
consolidated  interim financial  statements to be included in the Company's Form
10-Q for the  quarter  ended July 3, 2004,  which is  expected to be filed on or
before August 17, 2004.

         Deloitte's  reports on the Company's  financial  statements  for fiscal
2003 and 2002 do not contain an adverse opinion or a disclaimer of opinion,  and
are not  qualified  or modified  as to  uncertainty,  audit scope or  accounting
principles,  except that such reports include an explanatory  paragraph relating
to a change in method of accounting  for goodwill and other  intangible  assets.
The decision to change  accountants was not recommended or approved by the audit
committee of the Company's board of directors.

         During  fiscal 2003 and 2002 and through June 18,  2004,  there were no
disagreements  between  the Company  and  Deloitte  on any matter of  accounting
principles or practices,  financial statement  disclosure,  or auditing scope or
procedure which disagreements, if not resolved to Deloitte's satisfaction, would
have  caused  Deloitte to make  reference  thereto in  Deloitte's  report on the
Company's  financial  statements  for such periods.  In addition,  no reportable
events,  as defined in Item  304(a)(l)(v) of Regulation S-K, occurred during the
Company's two most recent fiscal years and through June 18, 2004.

         The  Company  has  requested  that  Deloitte  furnish  it with a letter
addressed to the Securities and Exchange  Commission stating that it agrees with
the above statements. A copy of such letter is attached hereto as Exhibit 16.1.

ITEM 7. Financial Statements and Exhibits

      (c)  Exhibits.

         16.1  Letter from Deloitte & Touche LLP to the  Securities and Exchange
               Commission regarding change in certifying accountant.





                                    SIGNATURE

         Pursuant to the requirements of the Securities Exchange Act of 1934,
the Registrant has duly caused this report to be signed on its behalf by the
undersigned hereunto duly authorized.

Dated: June 25, 2004

                                       NANOMETRICS INCORPORATED

                                       By:  /s/ Paul B. Nolan
                                          --------------------------------------
                                          Paul B. Nolan
                                          Chief Financial Officer





                                  Exhibit Index

Exhibit
Number       Description
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16.1          Letter from Deloitte & Touche LLP to the  Securities  and Exchange
              Commission regarding change in certifying accountant.